Monitoring Construction Vibration for Sensitive Facilities

by Anthony J. Baxter, P.E. (Minnesota)

We are often asked to monitor vibration in sensitive facilities while construction is occurring nearby.  Common types of sensitive facilities are:

  • Medical facilities
  • Research facilities
  • Semiconductor fabs
  • Data centers

Although construction vibration monitoring is often used to prevent structural damage of nearby buildings, sensitive facilities require much more precise monitoring.  The monitoring to “protect” the sensitive environments requires special instrumentation and analysis techniques.  We often say – only half joking – that our systems are sensitive enough to detect a mouse tiptoeing on cotton at 100 feet.  In reality, we can reliably measure the extremely low levels that affect the sensitive equipment and processes in these facilities, at levels that are far below the thresholds of structural damage (or that people feel). 

Owners, managers, contractors and other stakeholders sleep better knowing that vibration is being monitored continuously during a construction project.  Contactors have particularly appreciated knowing when they are causing high levels and have then made changes to their construction methods. 

ESI has monitored vibration on many projects.  The goal of vibration monitoring has always been the same: to accurately measure vibration and to provide timely alarms that protect the sensitive environments, processes, and equipment. 

Monitoring construction vibration in sensitive facilities involves several steps:

  1. Monitoring baseline vibration levels prior to construction.
  2. Establishing alarm levels.
  3. Monitoring vibration during construction and sending alarm emails/ texts to alert stakeholders of exceedances.
  4. Adjusting alarm levels based on facility experiences and to accommodate changing construction methods.

The following are project examples where ESI provided vibration monitoring in sensitive facilities during construction projects. 

If you are planning construction near your sensitive facility, we would be happy to discuss your requirements.  Please contact us for more information.  

Mayo Clinic – Anna-Maria and Stephen Kellen Building, Rochester, Minnesota

This biomedical research facility is 11 stories with a façade that inspires innovation and discovery.  It was constructed adjacent and connected to the existing Opus Imaging Research Building that has several high-resolution research MRI’s. 

This photo shows the construction site and the existing Opus Building.  ESI monitored VC-D level vibration in the Opus Building over a 4-month period during earth work while soldier piles and auger cast piles were placed.  By working closely with both the contractor and the researchers, we were able to fine tune alarm limits so that construction could proceed without disrupting sensitive research.  This collaborative, data‑driven approach resulted in a highly successful outcome for all parties.

Allina Health System – Abbott Northwestern Hospital and Central Laboratory, Minneapolis, Minnesota

Over the past five years, Allina Health has completed a series of major construction projects on the Abbott Northwestern Hospital campus in Minneapolis, including a new Transportation Hub, a Central Utility Plant, and most recently, a 10‑story Surgical and Critical Care Pavilion.  Remarkably, this work was accomplished while the existing hospital remained fully operational, continuing a legacy of world‑class healthcare at this site dating back to 1882. 

ESI provided vibration monitoring within laboratories, MRI imaging suites, and operating rooms during critical phases of demolition, earthwork, and building construction.  Vibration exceedance alarms were delivered immediately via text message and email to both hospital staff and construction teams.  Each monitored location had unique alarm thresholds and measurement metrics.  ESI tailored the analysis to match the specific performance requirements of the equipment and processes in each space. 

Semiconductor Manufacturing – Multiple Confidential Clients

ESI specializes in vibration measurement and monitoring for semiconductor fabrication facilities, which commonly require VC‑D and VC‑E levels – among the most stringent vibration criteria.  Tool manufacturers such as ASML, KLA, and Applied Materials specify allowable vibration limits.  When vibration levels exceed those specifications, tool production rates and yields can be impacted.

Our monitoring system continuously measures low amplitude vibration on the floor near critical tools and compares measured amplitudes to manufacturer criteria in real time. When vibration levels exceed those criteria, text message and email alerts are immediately sent to facility engineers and contractors.  All exceedance events are logged and archived, allowing manufacturing engineers to correlate events with production rates and yields when needed.  Each monitored location can have unique alarm thresholds and measurement metrics tailored to the specific requirements of the tools and processes.

written by Anthony J. Baxter, P.E. (Minnesota)